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半導體設備及材料事業部
磊晶爐
磊晶片
矽基板
碳化矽基板
半導體二手設備
磊晶爐 EPI reactor
MT7700
1. MT7700 Configuration
5 Lamp Modules – 20 Lamps Each
Refined 9-Zone Temperature Control
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New Susceptor
New Quartz Bell Jar
New Quartz Hanger
New Cooling Plates
New Patented Gold Reflectors
New Controller – Rapid Heat-up Option
Kits Available for Your Installed System
2. MT7700K Configuration
5 Lamp Modules – 23 Lamps Each
New 8-Zone Temperature Control
New Susceptor – Expanded Loading
New Quartz Bell Jar
New Quartz Hanger
New Cooling Plates
Improved Gold Reflectors – Patented
New Controller “Turbobaby” – Rapid Heat-up Option