磊晶爐 EPI reactor
Moore Technologies is one of the world's leading suppliers
of Semiconductor Process Control Equipment. They have been in business since
1988, which makes them the newest entry in this field, but the most innovative
company you will find.
Moore Technologies designs, manufactures and markets a
family of products ranging from the MT308 series of epitaxial reactors, to the
Expansion Kit® that increases throughput of existing 7700 and 78XX series
reactors through system upgrades. SIMGUI also has a state-of-the-art cleanroom
producing silicon epi wafers.
eZEN CVD system
Our Design philosphy - "Reduce CVD film costs, produce
the highest quality product and set a standard that all others must follow". The
eZEN CVD system is just such a product. Based on the "Mini-Batch™" platform,
it's capable of running five 5" and 6" and three 8" wafers.
The MT7700 family systems bring major economic
advantages to the epi market. High yield is a result of outstanding film quality
and run-to-run repeatability. With the new heat array of 23 lamps for each
module and the improved heat power distribution, the MT7700K outperforms the
older model 7700.
Expandoman - Expansion
Leave it to the Expandoman to develop a way to expand
your epitaxial capacity and lower your epitaxial costs. With the Expansion Kit®,
your 78XX and 7700 system can now be retrofitted for 3 high 150mm wafers; that
is a batch size of 15-150mm wafers.
Improve Thickness and Resistivity Uniformities on Auto
or Manual Systems. Reduce or Eliminate the thickness spiral as well as the
problem on the top of top wafer. Produces 24 - 5" wafers per